[Qnfcf-intlvac-ebeam] New Gold crucible in Intlvac

Nathan Nelson - Fitzpatrick nnelsonf at uwaterloo.ca
Fri Nov 30 16:45:21 EST 2018

Hi everyone,

I just wanted to inform the Intlvac user community that we are replacing the crucible used for Gold depositions and have filled it with new Gold material.  The Fab has purchased and tested a new Molybdenum crucible liner which can now be used for your Gold depositions.  This Molybdenum liner should improve “spitting” during deposition and will not contribute carbon “dust” to the melt if the liner surface is scratched.  Typical emission currents (power) are very slightly higher than before with this new liner.  This new Gold material and Mo liner are installed in the Intlvac and available immediately.

Lino and I have put a lot of work in to ensure that existing processes can work with the new Gold liner with no user intervention.  The following process recipes have been updated to work with the new gold film definition.

  1.  Gold
  2.  Ti/Au
  3.  Cr/Au
  4.  Ni/Au
  5.  Ni/Ge/Au
  6.  ProcessCr/Ni/Au
  7.  Ge/Au
  8.  Al2O3/Ti/Au
  9.  Pd/Au
  10. Pd/Ge/Au
  11. Ni/Cr/Au

The old Fabmate crucible and Gold are being retained for some time in case there are any problems that emerge.  If you have additional questions or concerns please contact me by email.

Best regards,
Nathan Nelson-Fitzpatrick  PhD
Nanofabrication Process & Characterization Engineering Manager
Quantum-Nano Fabrication and Characterization Facility (QNFCF)
Office of Research
University of Waterloo
200 University Avenue West, Waterloo, ON  N2L 3G1
P: 519-888-4567 ext. 31796
C: 226-218-3206

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